LASER STAGE APPARATUS, LASER PROCESSING APPARATUS HAVING IT AND CONTROL METHOD OF LASER STAGE APPARATUS

摘要

The present invention relates to a laser stage apparatus, a laser processing apparatus having the same, and a control method of the laser stage apparatus. The present invention may comprise: a fixating rack; a movable rotary rack which is movable in the direction of a first axis along a first guide member which is installed in the fixating rack and which is movable and rotatable along a rotation guiding member which is installed in the first guide member; a movable rotary apparatus capable of moving and rotating the movable rotary rack in the direction of the first axis; a second movable rack which is movable in the direction of a second axis along a second guide member which is installed in the movable rotary rack; a second axis moving apparatus which is installed between the movable rotary rack and the second movable rack and is capable of moving the second axis movable rack in the direction of the second axis; and a laser light irradiation apparatus which is installed in the second movable rack and is capable of irradiating laser light on a substrate.