| 摘要 |
PROBLEM TO BE SOLVED: To transfer graphene formed on SiC to another substrate without destroying a structure of the graphene.SOLUTION: On graphene 102, a polyvinyl alcohol membrane (PVA membrane) 103 is formed (a sacrificial layer formation step). For example, a water solution that PVA (polyvinyl alcohol) is dissolved in 10% by mass concentration is dropped on the surface of a SiC substrate 101 that the graphene 102 is formed, and is coated by spin for 1 minute in 1500 rpm. Then, moisture is removed from the applied membrane by heating on a hot plate in which a preset temperature is 75°C, and the membrane becomes the PVA membrane 103. The PVA membrane 103 is used as a sacrificial layer. |
