| 发明名称 |
A CHUCK OF EXPOSURE MACHINE FOR CRYSTAL DISPLAY DEVICE |
| 摘要 |
<p>The present invention relates to a chuck (100) of an exposure machine for a crystal display device which comprises a ceramic material body of a plate shape which has a surface where convex parts (101) are formed, and a TiO2 thermal spray layer attached to the surface of the body by a thermal spray process. A thermal spray layer after use is removed. The thermal spray layer is formed again to be reused.</p> |
| 申请公布号 |
KR101485707(B1) |
申请公布日期 |
2015.01.22 |
| 申请号 |
KR20130128541 |
申请日期 |
2013.10.28 |
| 申请人 |
WIZIT CO., LTD. |
发明人 |
PARK, SANG MYOUNG;PARK, SU HO;KIM, SANG HWAN |
| 分类号 |
G02F1/13;G03F7/20;H01L21/027 |
主分类号 |
G02F1/13 |
| 代理机构 |
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