GOING UP AND DOWN DEVICE AND APPARATUS FOR TRANSFERRING SUBSTRATE HAVING THE SAME

摘要

The present invention relates to an elevator for a substrate transfer apparatus and the substrate transfer apparatus having the same, wherein the elevator includes: an elevation frame which is coupled to a transfer arm supporting a substrate and allows the elevation of the transfer arm; a rack gear coupled to the elevation frame in an elevation direction of the transfer arm; a pinion gear engaged with the rack gear; a driving part coupled to the transfer arm, and rotating the pinion gear in order to elevate the transfer arm; and an oil supply part which supplies a lubricant to the rack gear according to the elevation of the transfer arm. According to the present invention, in a process of injecting the lubricant, a process of assembling an elevation part again after disassembling the elevation part can be excluded to reduce time for transferring the substrate, thereby improving the productivity of an electronic component manufactured by the substrate.