发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p>According to an embodiment of the invention, there is provided a method of manufacturing a semiconductor device. The method of manufacturing the semiconductor device includes forming a trench downward from an upper face of a semiconductor layer at a position where an element isolation area is formed in the semiconductor layer, and melting the upper face of the trench-formed semiconductor layer to close an open end of the trench.</p>
申请公布号 KR101485675(B1) 申请公布日期 2015.01.22
申请号 KR20130060322 申请日期 2013.05.28
申请人 发明人
分类号 H01L21/762 主分类号 H01L21/762
代理机构 代理人
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