SUCTION STRUCTURE, ROBOT HAND, AND ROBOT

摘要

PROBLEM TO BE SOLVED: To unfailingly suction a substrate where warpage occurs.SOLUTION: A suction structure according to one embodiment includes: a fixed base (a plate); a pad; a support part; a vacuum chamber; and a suction hole. The pad includes a contact part which contacts with a suctioned object. The support part is provided at the fixed base and elastically supports the pad. The vacuum chamber is formed by the pad and the support part. The suction hole is provided at the fixed base and allows the vacuum chamber to communicate with a vacuum source.