发明名称 |
DISPLAY DEVICE AND ELECTRONIC DEVICE INCLUDING THE SAME |
摘要 |
One embodiment of the present invention provides a highly reliably display device in which a high mobility is achieved in an oxide semiconductor. A first oxide component is formed over a base component. Crystal growth proceeds from a surface toward an inside of the first oxide component by a first heat treatment, so that a first oxide crystal component is formed in contact with at least part of the base component. A second oxide component is formed over the first oxide crystal component. Crystal growth is performed by a second heat treatment using the first oxide crystal component as a seed, so that a second oxide crystal component is formed. Thus, a stacked oxide material is formed. A transistor with a high mobility is formed using the stacked oxide material and a driver circuit is formed using the transistor. |
申请公布号 |
US2015021600(A1) |
申请公布日期 |
2015.01.22 |
申请号 |
US201414507204 |
申请日期 |
2014.10.06 |
申请人 |
Semiconductor Energy Laboratory Co., Ltd. |
发明人 |
KOYAMA Jun;YAMAZAKI Shunpei |
分类号 |
H01L27/12 |
主分类号 |
H01L27/12 |
代理机构 |
|
代理人 |
|
主权项 |
1. (canceled) |
地址 |
Atsugi-shi JP |