发明名称 DISTANCE MEASURING APPARATUS, DISTANCE MEASURING METHOD, AND CONTROL PROGRAM
摘要 According to an embodiment, a distance measuring apparatus includes a multi laser beam emitting unit, an irradiating position changing unit, an image acquiring unit, and a distance calculating unit. The multi laser beam emitting unit irradiates a surface of a measurement target object with a plurality of elliptical laser beams provided in line in a minor axis direction. The irradiating position changing unit reciprocally moves irradiating positions of the laser beams all together along a major axis of the laser beams. The image acquiring unit receives reflected lights of the laser beams, and acquires an image of a bright and dark pattern of the reflected lights of the laser beams formed on an image acquiring face. The distance calculating unit calculates a distance to the measurement target object based on the bright and dark pattern of the reflected lights on the image acquiring face.
申请公布号 US2015025843(A1) 申请公布日期 2015.01.22
申请号 US201314365087 申请日期 2013.01.28
申请人 Kabushiki Kaisha Toshiba 发明人 Takemura Shota
分类号 G01B11/14;H01L27/148 主分类号 G01B11/14
代理机构 代理人
主权项 1. A distance measuring apparatus comprising: a multi laser beam emitting unit that irradiates a surface of a measurement target object with a plurality of elliptical laser beams provided in line in a minor axis direction; an irradiating position changing unit that reciprocally moves irradiating positions of the laser beams all together along a major axis of the laser beams; an image acquiring unit that receives reflected lights of the laser beams, and acquires an image of a bright and dark pattern of the reflected lights of the laser beams formed on an image acquiring face; and a distance calculating unit that calculates a distance to the measurement target object based on the bright and dark pattern of the reflected lights on the image acquiring face.
地址 Minato-ku, Tokyo JP