发明名称 |
DISTANCE MEASURING APPARATUS, DISTANCE MEASURING METHOD, AND CONTROL PROGRAM |
摘要 |
According to an embodiment, a distance measuring apparatus includes a multi laser beam emitting unit, an irradiating position changing unit, an image acquiring unit, and a distance calculating unit. The multi laser beam emitting unit irradiates a surface of a measurement target object with a plurality of elliptical laser beams provided in line in a minor axis direction. The irradiating position changing unit reciprocally moves irradiating positions of the laser beams all together along a major axis of the laser beams. The image acquiring unit receives reflected lights of the laser beams, and acquires an image of a bright and dark pattern of the reflected lights of the laser beams formed on an image acquiring face. The distance calculating unit calculates a distance to the measurement target object based on the bright and dark pattern of the reflected lights on the image acquiring face. |
申请公布号 |
US2015025843(A1) |
申请公布日期 |
2015.01.22 |
申请号 |
US201314365087 |
申请日期 |
2013.01.28 |
申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Takemura Shota |
分类号 |
G01B11/14;H01L27/148 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
1. A distance measuring apparatus comprising:
a multi laser beam emitting unit that irradiates a surface of a measurement target object with a plurality of elliptical laser beams provided in line in a minor axis direction; an irradiating position changing unit that reciprocally moves irradiating positions of the laser beams all together along a major axis of the laser beams; an image acquiring unit that receives reflected lights of the laser beams, and acquires an image of a bright and dark pattern of the reflected lights of the laser beams formed on an image acquiring face; and a distance calculating unit that calculates a distance to the measurement target object based on the bright and dark pattern of the reflected lights on the image acquiring face. |
地址 |
Minato-ku, Tokyo JP |