METHOD FOR PRODUCING MULTILAYERED GLASS-CERAMIC STRUCTURE WITH COPPOR-BASED CONDUCTORS

摘要

Structure is produced by firing a multilayered structure in which patterns of copper based paste and ceramic layers are laminated alternately. The ceramic layers are glass ceramic green sheets contg. a thermally depolymerisable resin binder. Firing is conducted in two stages, the first being in an inert atmosphere contg. water vapour at a partial pressure of 0.005-0.3 atm. at a temp. at which the binder is depolymerised and eliminated but the glass ceramic and copper components are unchanged. The second firing stage is in an inert atmosphere without water vapour at a higher temp. at which particles of the glass ceramic components coalesce but the matallic stage of the copper is not affected.