| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent an electrostatic sensitive device from being damaged by making an AC component of a space charge smaller in a steady state.SOLUTION: A static eliminator includes: a first power supply circuit 5a in which a discharge electrode needle 2a of a first electrode needle group and a discharge electrode needle 2b of a second electrode needle group are arranged and a high AC voltage is applied to the first electrode needle group; and a second power supply circuit 5b in which the high AC voltage is applied to the second electrode needle group. The first and second power supply circuits 5a, 5b output the AC voltage whose polarities are inverse to each other, and a processing object is statically eliminated by discharge generated at the tip of the respective discharge electrode needles 2a, 2b.</p> |
