| 摘要 |
<p>PROBLEM TO BE SOLVED: To solve such a problem that although the energy of a signal electron, that can be selected by the difference between a retarding voltage value and a voltage value applied to an energy filter, can be determined, adjustment to an optimum voltage value is difficult because there are a plurality of variable parameters when adjusting these voltage values, and to provide a charged particle beam device in which the optimum barrier conditions, e.g., the retarding voltage value and the voltage value being applied to the energy filter can be set simply.SOLUTION: A filter voltage, i.e., the difference of a booster voltage and a retarding voltage, is changed in a plurality of conditions, the image of a sample is generated in each conditions, and then the optimum value of the filter voltage is determined based on the contrast ratio or the contrast difference between the inside and outside of an observation object in an image thus generated.</p> |
