| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrode forming apparatus capable of forming an electrode which has the surface of an insulator film having uniform thickness by performing precise patterning.SOLUTION: The electrode forming apparatus includes: an application section (11) that forms an insulator film of the surface of an electrode substrate; and a patterning section (16) that removes a predetermined region of the insulator film. The patterning section (16) includes: a peeling section (13) that peels off the region to be removed from the electrode substrate by irradiating the region to be removed of the film with a laser beam of a first wavelength which transmits the insulator; and a cutting section (15) that cuts the region to be removed of the film from the periphery thereof.</p> |
