发明名称 |
FLUIDIZED BED ATOMIC LAYER DEPOSITION DEVICE FOR MANUFACTURING NANOCOATING PARTICLES |
摘要 |
Disclosed is a fluidized bed atomic layer deposition device for manufacturing nanocoating particles. A fluidized bed atomic layer deposition device according to an embodiment of the present invention comprises: a fluidized bed reactor, into which particles to be coated are injected; a reaction material supply unit for supplying reaction gases for coating the particles to be coated into the fluidized bed reactor; and a vibration pump coupled to the fluidized bed reactor such that the reaction gases can move therethrough, the vibration pump giving the reaction gasses regular vibration and thereby forming a turbulence inside the fluidized bed reactor. |
申请公布号 |
WO2015009038(A1) |
申请公布日期 |
2015.01.22 |
申请号 |
WO2014KR06403 |
申请日期 |
2014.07.15 |
申请人 |
GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE, JAEYOUNG;CHUNG, SANG HO;LEE, JAE KWANG;JU, HYUNGKUK;KIM, JIN WON |
分类号 |
C23C16/44;C23C16/448;C23C16/455 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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