发明名称 SEMICONDUCTOR DEVICE AND DIELECTRIC FILM
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a hafnium oxide ferroelectric film or a ferridielectric film, which has a low coercive electric field.SOLUTION: A semiconductor device of an embodiment comprises: a first conductive layer; a second conductive layer; and a hafnium oxide ferroelectric film or a ferridielectric film, which is provided between the first conductive layer and the second conductive layer and contains at least one element A selected from Zn, Mg, Mn, Nb, Sc, Fe, Cr, Co, In, Li and N.
申请公布号 JP2015015334(A) 申请公布日期 2015.01.22
申请号 JP20130140431 申请日期 2013.07.04
申请人 TOSHIBA CORP 发明人 INO TSUNEHIRO
分类号 H01L21/8246;H01L21/336;H01L27/105;H01L29/788;H01L29/792;H01L45/00;H01L49/00 主分类号 H01L21/8246
代理机构 代理人
主权项
地址
您可能感兴趣的专利