OXIDATION SINTER BODY AND PRODUCTION METHOD THEREOF, AND OXIDATION FILM

摘要

PROBLEM TO BE SOLVED: To provide an oxidation sinter body which allows stable discharge which has been impossible in conventional arts in an In-Si-O based oxidation sinter body.SOLUTION: There is provided the oxidation sinter body which includes In and Si, a content of the Si is 0.65 or more and 1.75 or less in an Si/In atomic ratio, has a crystal phase of an indium silicate compound having a thortveitite-type structure, and does not include a silicon dioxide phase and a metal silicon phase.