| 主权项 |
1. A fluid handling device comprising:
a first chip and a second chip, the first chip including a first substrate, a first film made of a resin, and a partition wall, the first substrate having a first groove provided in a surface of the first substrate, the first film being bonded on the surface of the first substrate, the partition wall being disposed in a fluid channel defined by the first film and the first groove, the first film having a deflective displaceable region formed at a position corresponding to the partition wall, the second chip including a second substrate and a second film made of elastomer, the second substrate having a recess opening at a surface of the second substrate and a communication path connecting the recess and an outside, the second film being disposed in close contact with the surface of the second substrate in such a manner that the second film seals an opening of the recess opening at the surface, wherein the second film has an elastic modulus higher than an elastic modulus of the first film, the first chip and the second chip are stacked in such a manner that the partition wall and the recess face each other with the first film and the second film therebetween, and that the first film is pressed against the partition wall, and, when an inner side of the recess is set to a negative pressure, the second film is sucked into the recess with the first film bent toward the recess, and a gap is formed between the first film and the partition wall so as to open the fluid channel. |
