| 摘要 |
Provided is a metallic polishing pad allowing the area coming in contact or in extreme close proximity with a catalyst to be increased on a surface to be processed. A metallic polishing pad (2) for smoothing a surface (6a) to be processed of a workpiece (6) by a catalyst-assisted chemical processing method is constituted from a compression-molded body of metal fibers comprising a transition metal catalyst. Being constituted from metal fibers, the compression-molded body has cavities therein, enabling elastic deformation of metal fibers present on a polishing pad surface (2a). Therefore, when the polishing pad surface (2a) and the surface (6a) to be processed of the workpiece (6) are pressed against each other, the metal fibers deform, adapting to the microscopic asperities present on the surface (6a), thereby reducing the space generated between the polishing pad surface (2a) and the surface (6a) to be processed. In this manner, the area coming in contact or in extreme close proximity with a catalyst can be increased on the surface (6a) to be processed. |
