GRANULATION OF ALUMINIUM NITRIDE POWDER AND ITS APPLICATIONS

摘要

The present invention relates to a method of manufacturing high purity aluminum nitride granules in which a size is 100μm or more even when aluminum nitride nanopowders and micro-sized powders are mixed. The present invention provides a method of manufacturing aluminum powder granules for single crystal growth comprising: (a) a step of manufacturing mixed powders of first aluminum nitride powders consisting of first particles with an average particle diameter of 1-20μm, second aluminum nitride powders consisting of second particles with an average particle diameter of 100 nm or less and organic binders; (b) a step of granulating the mixed powders; (c) a step of heating the mixed powders at a temperature of 1600-2000°C. The present invention is able to provide high purity aluminum nitride granules for single crystal growth by manufacturing granules with large and uniform particle diameter without sintering aid.