X-ray testing device for material testing and method for the generation of high-resolution projections of a test object by means of x-ray beams

摘要

The invention relates to an X-ray testing device (1) for material testing for generating high-resolution geometric projections of a test object (100) by means of X-ray beams. It comprises a highly focusing X-ray source (10) comprising a rotary anode assembly (20) with a rotatably mounted anode plate (22) and an anode plate drive (28) which is configured to set the anode plate (22) into a rotary motion. Furthermore, it comprises an electron gun (40) which is configured to generate a focused electron beam (42), and an electron beam control unit (50), which comprises an electron beam deflecting unit (52) and a control unit (54), and which is configured to control the point of incidence (44) of the electron beam (42) generated by the electron gun (40) on the anode plate (22). Finally, a bracket (102) for a test object (100) is provided, with the position of the bracket (102) relative to the rotary anode assembly (20) being fixed or capable of being fixed. Furthermore, the invention relates to a method for generating high-resolution geometric projections of a test object (100) by means of X-ray beams, using an X-ray testing device according to the invention.The principle underlying the invention is to compensate for the motion of the focal point incident on the anode plate (22) which results from mechanical instabilities and/or thermal expansion of said anode plate (22).