发明名称 |
Surface treatment and apparatus therefor |
摘要 |
An apparatus for surface treating a sample article with activated particles, comprising a reaction chamber in which a sample article to be surface processed is placed, means for introducing a reaction gas into the reaction chamber, an activation surface properly set in the reaction chamber and arranged capable of activating at least one part of the particles composing the reaction gas, and means for evacuating the used reaction gas out of the reaction chamber.
|
申请公布号 |
US4886571(A) |
申请公布日期 |
1989.12.12 |
申请号 |
US19890302334 |
申请日期 |
1989.01.27 |
申请人 |
HITACHI, LTD. |
发明人 |
SUZUKI, KEIZO;HIRAOKA, SUSUMU;NISHIMATSU, SHIGERU |
分类号 |
H01L21/302;C23C16/44;C23C16/455;H01L21/205;H01L21/3065 |
主分类号 |
H01L21/302 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|