| 摘要 |
PROBLEM TO BE SOLVED: To provide a stress detection element which can be reduced in size and detect shear force and pressing force accurately, and to provide a tactile sensor and a grasping device.SOLUTION: A stress detection element 200 comprises: a sensor substrate 11 comprising a rectangular opening 111; a support film 14 which is formed on the sensor substrate 11 to close up the opening 111 and has flexibility; a shear-force detecting piezoelectric body 210 which is provided along one side of the opening 111, while straddling an inside and an outside of the opening 111 in a sensor plan view, and outputs an electric signal by curving; a pressing-force detecting piezoelectric body 310 which is provided inside the opening 111 at a position apart from the shear-force detecting piezoelectric body 210 in the sensor plan view, and outputs an electric signal by curving; and an elastic film 15 covering the support film 14. |
