| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acceleration sensor with high reliability which suppresses property deterioration from electrification. <P>SOLUTION: The acceleration sensor comprises: a frame part 11 which is composed of an SOI substrate comprising a silicon active layer, a buried insulating layer and a supporting substrate, and has a window part 10 penetrating from a top surface to a lower surface of the SOI substrate; movable electrodes 4 composed of the SOI substrate and arranged inside of the window part 10; beam parts 41 and 42 which connect the silicon active layer of the frame part 11 and the silicon active layers of the movable electrodes 4, and support the movable electrodes in a swingable manner against the frame part 11; and fixed electrodes 21 and 22 arranged separating from the movable electrodes 4 on a surface facing the movable electrodes 4. The movable electrodes 4 and the frame part 11 comprise contact parts 61-63 for electrically connecting the silicon active layer and the supporting substrate respectively. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
