发明名称 治具プレートを使用した半導体デバイスチップの積層方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a jig plate which can easily stack a plurality of semiconductor device chips corresponding to each of semiconductor devices formed on a semiconductor device wafer. <P>SOLUTION: In the jig plate which is used when a semiconductor device chip having a second semiconductor device formed thereon is stacked on each of first semiconductor devices of a semiconductor device wafer having the first semiconductor devices formed in each of regions that are partitioned by a plurality of crossing predetermined division lines, the jig plate has a reference pattern corresponding to the predetermined division lines of the semiconductor device wafer formed thereon. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5656609(B2) 申请公布日期 2015.01.21
申请号 JP20100283283 申请日期 2010.12.20
申请人 发明人
分类号 H01L21/673 主分类号 H01L21/673
代理机构 代理人
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