发明名称 Mirror drive device and driving method thereof
摘要 <p>In a mirror drive device, a first and second actuator sections are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. Division of an upper and lower electrodes of each of the first and second actuator sections is performed correspondingly to stress distribution of principal stresses in a piezoelectric body in resonant mode vibration, and a piezoelectric body portion corresponding to positions of a first and third upper electrode sections, and a piezoelectric body portion corresponding to positions of a second and fourth upper electrode sections have stresses in opposite directions to each other. Division of the lower electrodes is performed similar to the upper electrodes, and drive voltages having the same phase can be respectively applied to the upper and lower electrode sections of the piezoelectric body portions that are different due to a division arrangement.</p>
申请公布号 EP2827182(A1) 申请公布日期 2015.01.21
申请号 EP20140177044 申请日期 2014.07.15
申请人 FUJIFILM CORPORATION 发明人 NAONO, TAKAYUKI
分类号 G02B26/08;B81B3/00;G02B26/10;H01L41/00 主分类号 G02B26/08
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