METHOD FOR FABRICATING SPUTTERING TARGET, SPUTTERING TARGET USING THE METHOD, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SPUTTERING TARGET

摘要

Disclosed are a method of fabricating a sputtering target, a sputtering target fabricated by the method, and an organic light-emitting display apparatus fabricated by using the sputtering target. The disclosed sputtering target may be used for forming a thin film encapsulation layer. The sputtering target includes tin oxide as a main component, and a copper fluoride compound as a dopant.