发明名称 集積回路の信頼性を評価するための方法及びシステム
摘要 <p>The present invention provides a method. The method includes operating a plurality of field-effect-transistors (FETs) under a first operation condition; reversing an operation direction for at least one of the plurality of FETs for a brief period of time; measuring a second operation condition of the one of the plurality of FETs during the brief period of time; computing a difference between the second operation condition and a reference operation condition; and providing a reliability indicator based upon the difference between the second and the reference operation conditions, wherein the plurality of FETs are employed in a single integrated circuit (IC).</p>
申请公布号 JP5656489(B2) 申请公布日期 2015.01.21
申请号 JP20100158143 申请日期 2010.07.12
申请人 发明人
分类号 H01L21/8234;H01L21/822;H01L21/8238;H01L27/04;H01L27/088;H01L27/092 主分类号 H01L21/8234
代理机构 代理人
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