发明名称 |
ORGANIC RUTHENIUM COMPOUND FOR CHEMICAL VAPOR DEPOSITION RAW MATERIAL AND PRODUCTION METHOD FOR SAID ORGANIC RUTHENIUM COMPOUND |
摘要 |
<p>The present invention is an organoruthenium compound for a chemical vapor deposition raw material, including dodecacarbonyl triruthenium represented by the following chemical formula, wherein the iron (Fe) concentration is 1 ppm or less. The DCR in the present invention can be produced by obtaining crude DCR by directly carbonylating ruthenium through allowing a ruthenium salt and carbon monoxide to react with each other and by purifying the crude DCR by a sublimation method. In the synthesis step, the concentration of Fe in the obtained crude DCR is preferably set at 10 ppm or less.</p> |
申请公布号 |
EP2740816(A4) |
申请公布日期 |
2015.01.21 |
申请号 |
EP20120819564 |
申请日期 |
2012.07.24 |
申请人 |
TANAKA KIKINZOKU KOGYO K.K. |
发明人 |
SAITO, MASAYUKI;TANIUCHI, JUNICHI;NAKAGAWA, HIROFUMI |
分类号 |
C23C16/18;C01G55/00;C07F15/00;H01L21/28;H01L21/285 |
主分类号 |
C23C16/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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