| 摘要 |
<p>The present invention relates to a cartridge module which holds a wafer in an ion implant process of manufacturing the wafer into a semiconductor by injecting an ion such as phosphorous and boron. Provided is a cartridge module of an ion implant equipment which applies an insert part including a lift pin sip seal at a cartridge center portion to realize a new type of lip seal replacing method, wherein only the insert part is detached from the replacing work instead of detaching the whole cartridge from an apparatus when replacing a lift pin lip seal, thereby improving efficiency of the replacing work by saving the replacing time and preventing a scratch or contamination of a body part which may be formed in the replacing process, while applying a method of assembling and using one integrated twist lip seal instead of a conventional method of vertically assembling and using two twist lip seals, thereby reducing damages which may occurr in a process of assembling a twist lip seal by securing convenience and safety in assembling.</p> |
