| 摘要 |
<p>The present invention relates to a semiconductor process chamber clear lid which improves the visibility of the inside of the chamber using an LED integrally formed on polycarbonate. The semiconductor process chamber clear lid which improves the visibility of the inside of the chamber using an LED integrally formed on polycarbonate according to one embodiment of the present invention includes an aluminum base member (110); a polycarbonate window (120); and an aluminum clamp member (130).</p> |
