发明名称 |
SENSOR ARRANGEMENT COMPRISING A CARRIER SUBSTRATE AND A FERROELECTRIC LAYER AND METHOD FOR PRODUCING AND USING THE SENSOR ARRANGEMENT |
摘要 |
A sensor array comprises a carrier substrate and a ferro electric layer disposed on the carrier substrate, wherein the sensor array comprises means for reading the permittivity of the ferro electric layer. The sensor array is such that the ferro electric layer is disposed in a crystalline manner on the carrier substrate. A method for producing the sensor array and to use of the same is also disclosed. |
申请公布号 |
EP2826069(A1) |
申请公布日期 |
2015.01.21 |
申请号 |
EP20130716183 |
申请日期 |
2013.03.09 |
申请人 |
FORSCHUNGSZENTRUM JÜLICH GMBH |
发明人 |
WÖRDENWEBER, ROGER |
分类号 |
H01L29/51;G01L1/12;G01L9/00;G01N3/08;H01L41/113 |
主分类号 |
H01L29/51 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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