发明名称 ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC-RAY- OR RADIATION-SENSITIVE FILM THEREFROM AND METHOD OF FORMING PATTERN
摘要 According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a compound (P) containing at least one phenolic hydroxyl group and at least one group with a phenolic hydroxyl group whose hydrogen atom is replaced by any of groups of general formula (1) below.
申请公布号 EP2721446(A4) 申请公布日期 2015.01.21
申请号 EP20120801083 申请日期 2012.06.14
申请人 FUJIFILM CORPORATION 发明人 INASAKI, TAKESHI;KAWABATA, TAKESHI;TSUCHIMURA, TOMOTAKA
分类号 G03F7/039;C08F8/00;C08F212/14;C08F220/20;H01L21/027 主分类号 G03F7/039
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