发明名称 STORAGE DEVICE AND STORAGE METHOD
摘要 <p>A storage unit (2) includes: carousels (4, 6) each including a plurality of levels (9, 41) and including a plurality of spaces (8, 40) for storing containers (10, 54) on each level (9, 41), the carousels (4, 6) rotating around a vertical shaft (12); a loading port (34) for loading and unloading the containers (10, 54); transport units (28, 29) for transporting the containers (10, 54) between the loading port (34) and the storage spaces (8, 40); and pipes (58, 63) for feeding clean gas such that feeding is turned on and off for each storage space (8, 40), the pipes (58, 63) being configured to be connected to an intake port (55) provided for each container (10, 54).</p>
申请公布号 EP2727859(A4) 申请公布日期 2015.01.21
申请号 EP20120804353 申请日期 2012.05.17
申请人 MURATA MACHINERY, LTD. 发明人 FUKUSHIMA MASAZUMI
分类号 B65G1/04;H01L21/673;H01L21/677 主分类号 B65G1/04
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