| 摘要 |
<p>Optical apparatus for measuring characteristics of a measurement object, the apparatus comprising an illumination portion and, detection portion and a processing portion. The illumination portion produces at least one pair of spatially separated areas of illumination for illuminating an optically rough surface of the measurement object to produce an associated light field. The light field produced by the illumination of the surface of the measurement object comprises a component associated with self-interference within one of the areas of illumination and a component corresponding to interference between the areas of illumination which is separable from the component comprising interference associated with self-interference. The detection portion receives light from the measurement object, directs the received light onto a detector, outputs signals from the detector dependent on the intensity of the detected light. The processing portion analyses the signals output by the detecting means to measure the characteristics of the measurement object.</p> |
