发明名称 |
MECHANICALLY STABLE FIELD EMISSION GUN |
摘要 |
MECHANICALLY STABLE FIELD EMISSION GUN Mark A. Gesley Daniel B. DeBra An improved electron or ion gun support structure includes a hollow cylinder for rigidly connecting the source assembly to the source-motion ring, with the source cathode and associated lens extending into the hollow portion of the cylinder. The gun is thus made very stable and less susceptible to outside vibrations.
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申请公布号 |
CA2086976(A1) |
申请公布日期 |
1993.07.25 |
申请号 |
CA19932086976 |
申请日期 |
1993.01.08 |
申请人 |
ETEC SYSTEMS, INC. |
发明人 |
GESLEY, MARK A.;DEBRA, DANIEL B. |
分类号 |
H01J37/12;H01J37/06;H01J37/073;H01J37/08;H01J37/15;H01L21/027;(IPC1-7):H01J3/38 |
主分类号 |
H01J37/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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