发明名称 MECHANICALLY STABLE FIELD EMISSION GUN
摘要 MECHANICALLY STABLE FIELD EMISSION GUN Mark A. Gesley Daniel B. DeBra An improved electron or ion gun support structure includes a hollow cylinder for rigidly connecting the source assembly to the source-motion ring, with the source cathode and associated lens extending into the hollow portion of the cylinder. The gun is thus made very stable and less susceptible to outside vibrations.
申请公布号 CA2086976(A1) 申请公布日期 1993.07.25
申请号 CA19932086976 申请日期 1993.01.08
申请人 ETEC SYSTEMS, INC. 发明人 GESLEY, MARK A.;DEBRA, DANIEL B.
分类号 H01J37/12;H01J37/06;H01J37/073;H01J37/08;H01J37/15;H01L21/027;(IPC1-7):H01J3/38 主分类号 H01J37/12
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