Semiconductor device

摘要

A semiconductor device includes: an active region located in an upper portion of a semiconductor substrate; a through-hole electrode penetrating the substrate, and made of a conductor having a thermal expansion coefficient larger than that of a material for the substrate; and a stress buffer region located in the upper portion of the substrate and sandwiched between the through-hole electrode and the active region. The stress buffer region does not penetrate the substrate and includes a stress buffer part made of a material having a thermal expansion coefficient larger than that of the material for the substrate and an untreated region where the stress buffer part is not present. The stress buffer part is located in at least two locations sandwiching the untreated region in a cross section perpendicular to a surface of the substrate and passing through the through-hole electrode and the active region.

主权项

1. A semiconductor device, comprising:
an active region located in an upper portion of a semiconductor substrate; a through-hole electrode penetrating the semiconductor substrate, and made of a conductor having a thermal expansion coefficient larger than that of a material for the semiconductor substrate; and a stress buffer region located in the upper portion of the semiconductor substrate and sandwiched between the through-hole electrode and the active region, wherein the stress buffer region does not penetrate the semiconductor substrate and includes a stress buffer part made of a material having a thermal expansion coefficient larger than that of the material for the semiconductor substrate and an untreated semiconductor region where the stress buffer part is not present, an end of the upper portion of the semiconductor substrate near the stress buffer part is rounded, a trench is provided only in the end of the upper portion of a boundary between the semiconductor substrate and the stress buffer part, and the stress buffer part is located in at least two locations sandwiching the untreated semiconductor region in a cross section perpendicular to a surface of the semiconductor substrate and passing through the through-hole electrode and the active region, the untreated semiconductor region being part of the semiconductor substrate.