Semiconductor device and method of singulating semiconductor wafer along modified region within non-active region formed by irradiating energy through mounting tape

摘要

A semiconductor device has a semiconductor wafer with a plurality of semiconductor die separated by a non-active region. The semiconductor die can be circular or polygonal with three or more sides. A plurality of bumps is formed over the semiconductor die. A portion of semiconductor wafer is removed to thin the semiconductor wafer. A wafer ring is mounted to mounting tape. The semiconductor wafer is mounted to the mounting tape within the wafer ring. The mounting tape includes translucent or transparent material. A penetrable layer is applied over the bumps formed over the semiconductor wafer. An irradiated energy from a laser is applied through the mounting tape to the non-active region to form a modified region within the non-active region. The semiconductor wafer is singulated along the modified region to separate the semiconductor die.

主权项

1. A method of making a semiconductor device, comprising:
providing a semiconductor wafer having a plurality of semiconductor die separated by a non-active region; forming a plurality of bumps over the semiconductor die; providing a mounting tape; disposing the semiconductor wafer over the mounting tape; disposing a penetrable layer over the bumps formed over the semiconductor wafer; applying irradiated energy to the non-active region through the mounting tape for form a modified region within the non-active region; and singulating the semiconductor wafer along the modified region to separate the semiconductor die.