| 主权项 |
1. A multi-operation wafer baking system, comprising:
a chassis; a wafer loading device, which is mounted on the chassis for moving a wafer with respect to the chassis; a cruciform transportation device, which is mounted on the chassis for receiving a wafer from the wafer loading device and comprises a base, an elevation platform, and a rotation platform, the base being mounted on the chassis, the elevation platform being mounted on the base in a vertically movable manner, the rotation platform being mounted on the elevation platform in a rotatable manner, the rotation platform comprising at least four carrier arms mounted thereon to project radially outward from the rotation platform for carrying wafers; an annular baking device, which is mounted on the chassis to oppose the cruciform transportation device and comprises a central turn table, a plurality of wafer racks, and a plurality of baking tray assemblies, the central turn table being rotatably mounted on the chassis, the plurality of wafer racks being radially oriented and circumferentially arranged along a circumference of the central turn table for picking up wafers transported by the cruciform transportation device, the plurality of baking tray assemblies being mounted on the chassis and positioned outside and circumferentially surrounding the central turn table and the wafer racks, each of the baking tray assemblies functioning to receive a wafer supplied from a corresponding one of the wafer racks for performing a baking operation on the wafer, wherein the baking tray assemblies are isolated from each other and are set at different baking temperatures so that the wafer is sequentially conveyed through the baking tray assemblies and the baking operation of the wafer is carried out in compliance with a baking temperature variation mode determined by the different baking temperatures of the baking tray assemblies; and an unloading device, which is mounted on the chassis for receiving a baked wafer from the cruciform transportation device; wherein the rotation platform of the cruciform transportation device sequentially performs upward movement, rotation, and downward movement for picking up, moving, and positioning wafers; wherein the cruciform transportation device is locate at 6-o'clock direction of the annular baking device and the four carrier arms are pre-located at 6-o'clock, 9-o'clock, 12-o'clock, and 3-o'clock directions of the rotation platform, and wherein the carrier arm that is originally located at the 12-o'clock direction is moved upward to pick up a baked wafer from the wafer rack at 6-o'clock direction, rotated to 3-o'clock direction, and then moved downward to transfer the baked wafer to the unloading device; the wafer that is originally located at 9-o'clock direction is moved upward and rotated to the 12-o'clock direction to be located above the 6-o'clock-direction wafer rack, and is then moved downward to transfer the wafer to the wafer rack; and the carrier arm that is originally located at 6-o'clock direction is moved upward to pick up a wafer from the wafer loading device, and then rotated to 9-o'clock direction and downward moved; wherein each of the wafer racks comprises a fixing mount, a driving device, and two pick-up arms, the fixing mount being fixed on the central turn table, the driving device being mounted on the fixing mount, the two pick-up arms being mounted on the fixing mount in a manner that each is rotatable about an axis and is coupled to the driving device, whereby the two pick-up arms are rotatable in a symmetric manner to selectively reach horizontal positions for carrying a wafer thereon or to reach vertical positions for releasing and positioning the wafer, the axes about which the pick-up arms are rotatable being spaced from each other in such a way that when the pick-up arms are in the vertical positions, a distance is defined between the pick-up arms and is sufficiently large to allow the wafer to pass through the distance between the pick-up arms and is thus released; wherein each of the pick-up arms of each of the wafer racks forms a plurality of receiving slots, the receiving slots of the pick-up arms corresponding to each other and being of arc shapes so that when pick-up arms are at the horizontal positions, the corresponding ones of the arc shapes of the receiving slots collectively forming a circular recess, the circular recesses formed by arc shapes of the plurality of receiving slots having different sizes for snugly receiving wafers of different sizes therein; wherein each of the baking tray assemblies comprises a seat, a baking tray, and a plurality of ejection pins, the seat being mounted on the chassis, the baking tray being mounted on the seat, the plurality of ejection pins being arranged on the baking tray in a vertically extendible manner for selectively extending beyond the baking tray to raise a wafer or retracting back into the baking tray for lowering and positioning a wafer on a surface of the baking tray; wherein the number of the baking tray assemblies is less than that of the wafer racks by at least one, so that two of the baking tray assemblies that are adjacent to each other form a hand-over space therebetween for hand-over of wafer between the cruciform transportation device and a corresponding one of the wafer racks; wherein the number of the baking tray assemblies is less than that of the wafer racks by at least two, whereby a hand-over space is formed between two adjacent ones of the baking tray assemblies and a buffering space is formed between two other ones of the baking tray assemblies that are adjacent to each other for eliminating a possible abrupt change of temperature for baking wafers; wherein the baking tray of each of the baking tray assemblies comprises at least one group of raising blocks arranged thereon for supporting a wafer above the baking tray in a floating manner; wherein the wafer loading device comprises at least one wafer carriage case, a belt conveyor device, and a lateral transportation device, the wafer carriage case being mounted on the chassis in a releasable manner and being located at 9-o'clock direction of the cruciform transportation device, the wafer carriage case forming a plurality of wafer compartments for respectively receiving therein wafers, the belt conveyor device being mounted on the chassis between the wafer carriage case and the cruciform transportation device for conveying wafers of the wafer carriage case, the lateral transportation device comprising a slide support, a slide member, and an extendible arm the slide support being fixedly mounted on the chassis and located at 6-o'clock direction of the cruciform transportation device, the slide support comprising a slide rail mounted thereon, the slide member being mounted on the slide rail of the slide support in a laterally slidable manner, the slide member comprising an extension driving assembly mounted thereon, the extendible arm being mounted to the extension driving assembly and being extendable in a longitudinal direction with respect to the slide support in order to transfer a wafer to a 6-o'clock-direction carrier arm of the cruciform transportation device; and wherein the unloading device comprises a wafer carriage case and a belt conveyor device, the wafer carriage case being mounted on the chassis in a releasable manner and located at 3-o'clock direction of the cruciform transportation device, the belt conveyor device being mounted on the chassis between the cruciform transportation device and the wafer carriage case. |
