Gas laser oscillator having function to determine initiation of electric discharge

摘要

A gas laser oscillator includes a control apparatus which creates a command voltage, a laser power supply which supplies power to a discharge tube in accordance with the command voltage, and a voltage detecting unit which detects a voltage applied to the discharge tube. The control apparatus includes a determining unit which determines whether or not a discharge is initiated in the discharge tube, based on a rate of changes in the voltage detected by the voltage detecting unit when power is supplied to the discharge tube in accordance with the command voltage being increased in a stepwise manner. The determining unit is configured to determine whether or not a discharge is initiated in the discharge tube after an initial step that at least includes the first incremental step of the command voltage being increased in a stepwise manner.

主权项

1. A gas laser oscillator comprising:
a control apparatus which creates a command voltage; a laser power supply which supplies power to a discharge tube in accordance with the command voltage; and a voltage detecting unit which detects a voltage applied to said discharge tube, wherein said control apparatus includes a determining unit which determines whether or not an electric discharge is initiated in said discharge tube, based on a rate of changes in the voltage detected by said voltage detecting unit when power is supplied to said discharge tube in accordance with the command voltage being increased in a stepwise manner, and wherein said determining unit is configured to determine whether or not an electric discharge is initiated in said discharge tube after an initial step that at least includes the first incremental step of the command voltage being increased in a stepwise manner.