Liquid immersion member, immersion exposure apparatus, liquid recovering method, device fabricating method, program, and storage medium

摘要

A liquid immersion member is disposed inside an immersion exposure apparatus and at least partly around an optical member and around an optical path of exposure light that passes through a liquid between the optical member and an object. The liquid immersion member comprises: a first member, which has a first surface, a second surface that faces a direction other than that faced by the first surface, and a plurality of holes that connects the first surface and the second surface, that recovers at least some of the liquid from the space above the object opposing the first surface via the holes; a recovery passageway, wherethrough the liquid recovered via the holes of the first member flows; and a discharge part, which separately discharges a liquid and a gas from the recovery passageway. The first member comprises a first portion and a second portion. The second portion hinders a gas flowing from a space between the object and the first surface into the recovery passageway via the holes more than the first portion does.

主权项

1. A liquid immersion member, which is disposed inside an immersion exposure apparatus and at least partly around an optical member and around an optical path of exposure light that passes through a liquid between the optical member and an object, the liquid immersion member comprising:
a first member, which has a first surface, a second surface that faces a direction other than that faced by the first surface, and a plurality of holes that connects the first surface and the second surface, that recovers at least some of the liquid from a space above the object opposing the first surface via the holes; a recovery passageway through which the liquid recovered via the holes of the first member flows; and a discharge part, which separately discharges the liquid and a gas from the recovery passageway; wherein the first member comprises a first portion and a second portion; and the second portion hinders the gas from flowing from the space between the object and the first surface into the recovery passageway via the holes more than the first portion hinders the gas from flowing from the space between the object and the first surface into the recovery passageway via the holes.