摘要 |
PURPOSE:To prevent the deterioration of the output of a gas laser device even when the pulse-repetition rate of the device is raised. CONSTITUTION:The gas laser device is provided with a laser container 1 in which a gas laser medium is enclosed, a pair of main electrodes 2a and 2b positioned in the container 1, and preliminary ionizing electrodes which preliminarily ionize a discharging space section 13, in which a main discharge is ignited, prior to the main discharge and a plurality of through holes are formed through at least one of the main electrodes 2a and 2b. The preliminarily ionizing electrode of this laser device is composed of pin electrodes 22 arranged on the rear side of the electrodes 2a and 2b and a mobile electrode 21 which is positioned opposite to the electrodes 22. |