| 摘要 |
An objective of the present invention is to provide a method of attaching a resin sheet, capable of attaching the resin sheet to a workpiece at a uniform thickness. The resin sheet attaching method to attach the resin sheet to the workpiece includes a molecular weight reducing step of applying vacuum ultraviolet radiation to a front side of the resin sheet, thereby cutting an intermolecular bond in a surface region having a depth of tens of nanometers from the front side of the resin sheet to thereby reduce the molecular weight of the surface region and produce an adhesive force, and a resin sheet attaching step of attaching the surface of the resin sheet to the workpiece after performing the molecular weight reducing step. |
