| 摘要 |
<p>PURPOSE: A conveying robot system having a lifter supporting mechanism is provided to reduce detection of faulty elements caused by particles of a clean room and to enhance a yield rate because take-in/out of an auxiliary mechanism is omitted in maintenance. CONSTITUTION: A conveying robot(10) system having a lifter supporting mechanism comprises a tap unit(1) and male screw member(3). The tap unit is projected from the lateral side of a turning arm parallel to the lateral side of a lifting shaft unit(15). The male screw member moves through a hole bored toward a lifter from the tap unit. The upper part of the male screw member contacts to a bottom side, thereby supporting the lifter.</p> |
