Sensing device

摘要

A detection device is disclosed which includes: a detection plate in which a silicon layer and a silicon oxide layer are arranged in this order on a silica glass substrate; and optical prism which is optically adhered to a surface of the silica glass substrate of the detection plate, where the surface is not provided with the silicon layer and the silicon oxide layer; a light-irradiation unit configured to irradiate light to the detection plate through the optical prism and arranged so that light is incident on the optical prism with a fixed incident angle; and a light-detection unit configured to detect intensity of reflected light reflected from the detection plate, wherein the detection device detects a change in dielectric constant by detecting a change in property of the reflected light.

主权项

1. A detection device, comprising:
a detection plate comprising a silicon oxide layer, a silicon layer, and a silica glass substrate in the stated order from the top; an optical prism which is optically adhered to a surface of the silica glass substrate of the detection plate, where the surface is not provided with the silicon layer and the silicon oxide layer; a light-irradiation unit configured to irradiate light to the detection plate through the optical prism and arranged so that light is incident on the optical prism with a fixed incident angle; and a light-detection unit configured to detect intensity of reflected light reflected from the detection plate;
wherein the detection device detects a change in dielectric constant in the proximity of the surface of the silicon oxide layer of the detection plate by detecting a change in property of the reflected light, and wherein in the optical prism, an angle between an incident surface on which light irradiated from the light-irradiation unit is incident and an adhesion surface which adheres to the detection plate is 43° or less.