LASER CRYSTALLING APPARATUS

摘要

A laser crystalline apparatus according to an embodiment of the present invention may include a laser generator which generates a laser beam, a diffraction optical system which diffracts the laser beam to make the laser beam uniform on the focal plane of the laser beam, and a stage for mounting an object substrate crystallized by emitting the laser beam. Therefore, a laser crystalline apparatus having a diffraction optical system according to an embodiment of the present invention divides the laser beam into several sub beams by diffracting the laser beam, and allows the sub laser beams to generate destructive interference on the focal plane to make the laser beam uniform.