| 摘要 |
The present disclosure enables high-volume cost effective production of three-dimensional thin film solar cell (3-D TFSC) substrates. First, the present disclosure discloses pyramid-like unit cell structure 16 and 50 which enable epitaxial growth through their open pyramidal structure. The present disclosure than gives four 3-D TFSC embodiments 70, 82, 100, and 110 which may combined as necessary. A basic 3-D TFSC having a substrate, emitter, oxidation on the emitter, front and back metal contacts allows simple processing. Other embodiments disclose a selective emitter, selective backside metal contact, and front-side SiN ARC layers. Several processing methods including process flows 150, 200, 250, 300, and 350 enable production of these 3-D TFSC. Further, the present disclosure enables higher throughput through the use of dual sided template 400. By processing the substrate in the template, the present disclosure increases yield and reduces processing steps. |
| 主权项 |
1. A pyramidal three-dimensional thin film solar cell (3-D TFSC) having enhanced processing properties, comprising:
a p-type epitaxial 3-D TFSC substrate comprising a plurality of pyramidal unit cells, wherein said unit cells comprise:
tapered sidewalls having different crystallographic planes including the <111> plane, said tapered sidewalls forming an open pyramid-like structure;a substantially flat top-ridge having a crystallographic <100> plane, said top-ridge associated with said tapered sidewalls; andsaid tapered sidewalls having a backside surface; and said 3-D TFSC substrate further comprising a back P+ doped layer; a single phosphorous diffusion emitter layer formed in said tapered sidewalls and said top-ridge; an oxide passivation layer formed on said emitter layer, said oxide passivation layer formed on said tapered sidewalls; a blanket metal contact layer formed on said back surface; and front metal contacts formed on said emitter layer, said front metal contacts formed on said top-ridge. |
