Measurement assembly including a metrology system and a pointer that directs the metrology system

摘要

A measurement assembly (12) for measuring a feature (14A) on a surface (16) includes a metrology system (18), a mover assembly (19), a pointer (22), and a control system (24). The metrology system (18) generates a measurement beam (26), and the mover assembly (19) selectively adjusts the direction of the measurement beam (26). The pointer (22) is handheld and generates a pointer beam (34) that can be selectively directed at the surface (16) to form a pointer spot (36) on the surface (16). Further, the control system (24) controls the mover assembly (19) to move the direction of the measurement beam (26) until the measurement beam (26) is approximately directed at the pointer spot (36).

主权项

1. A measurement assembly for measuring a feature on a surface, the measurement assembly comprising:
a metrology system that generates a measurement beam; a mover assembly that selectively moves at least a portion of the metrology system to move a direction of the measurement beam; a pointer that generates a pointer beam that is selectively positioned to identify the feature; and a control system that controls the mover assembly to move the direction of the measurement beam until the measurement beam is approximately directed at the identified feature, the measurement beam being used to measure the identified feature.