| 摘要 |
A semiconductor device has a first controlled chip, including a first replica output circuit having the same configuration as a first output circuit, a first ZQ terminal connected to the first replica output circuit, a first through electrode connected to the first ZQ terminal, and a first control circuit which sets the impedance of the first replica output circuit. A control chip includes a second ZQ terminal connected to the first through electrode, a comparator circuit which compares a voltage of the second ZQ terminal with a reference voltage, and a second control circuit 123 which performs a process based on a comparison by the comparator circuit. The first control circuit and the second control circuit receive a common input signal to operate and sequentially change and set the impedance until the comparison result changes when an external resistance element is connected to the second ZQ terminal. |
| 主权项 |
1. A method to calibrate an impedance of a device having a plurality of stacked semiconductor devices interconnected by through electrodes, the method comprising:
coupling a resistor between an external terminal of the device and a first voltage source; and in each semiconductor device of the plurality of stacked semiconductor devices;
enabling a replica output circuit having a first plurality of transistors connected between a second voltage source and a first through electrode coupled to the external terminal;adjusting a count value to control a number of transistors of the first plurality of transistors in an on-state until the count value reaches a final count value, wherein while the count value is at the final count value, a voltage on the external terminal is at a predetermined voltage;storing the final count value; andcontrolling an output circuit having a second plurality of transistors connected between the second, voltage source and a second through electrode using the final count value, wherein a number of transistors of the second plurality of transistors in the on-state is determined by the final count value. |
