| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal production apparatus that suppresses the occurrence of dislocation by suppressing the transfer of radiation heat to a chamber from raw material melt, a seed crystal, and a seed chuck in heating and melting a raw material and seeding.SOLUTION: A single crystal production apparatus 1 includes a main chamber 6 housing crucibles 2,3 and a heater 5, a pull chamber 7 where a single crystal is pulled up and housed, a cylindrical straightening sleeve 10 that extends downward from the ceiling of the main chamber 6 and has an opening through which the single crystal is conducted, a seed chuck 12 for holding a seed crystal 11, and a heat insulation plate 13 that is installed at the lower end of the opening of the straightening sleeve 10 when a raw material is heated and melted and is pulled up together with the seed crystal 10 when the single crystal is pulled up. The seed chuck 12 is equipped with a holder 14 for holding the heat insulation plate 13, and the holder 14 has a mechanism to rotatably hold the heat insulation plate 13 independent of the rotation of the seed chuck 12. |
