发明名称 STORAGE EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide storage equipment capable of suppressing local increase of concentration of inert gas in an installation space where storage parts are installed.SOLUTION: Plural supply amount adjustment devices 40 are controlled by monitoring an inert gas supply state in plural storage parts 10S, the plural storage parts 10S are divided into plural monitor areas and then the inert gas supply state in the plural storage parts 10S is monitored. The plural supply amount adjustment devices 40 are controlled so that the inert gas supply state to the storage parts 10S belonging to each of the plural monitor areas satisfies a predetermined setting limitation condition.
申请公布号 JP2015009913(A) 申请公布日期 2015.01.19
申请号 JP20130134269 申请日期 2013.06.26
申请人 DAIFUKU CO LTD 发明人 TAKAHARA MASAHIRO;UEDA TOSHITO
分类号 B65G1/00;H01L21/673 主分类号 B65G1/00
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