| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate accommodation support device into a substrate housing capable of supporting a plurality of substrates while being spaced apart from each other at predetermined intervals in a direction across board surface when accommodating the plurality of substrates into the substrate housing in an erected state, and a substrate accommodation device.SOLUTION: The substrate accommodation support device comprises: holding shafts 19 which are provided so as to be movable forwards and backwards from one side of a cassette in an intersection direction and disposed while being spaced apart from each other in a direction along a surface of substrates and coupled in an independently rotatable manner; and a plurality of substrate holders 19b which are provided in an outer circumference of the holding shafts at a predetermined pitch in a length direction so as to be movable between a holding position to hold the substrates accommodated in an accommodation part and a cancel position to cancel the holding of the substrates by rotating the holding shafts. Each time the substrate is successively accommodated in the accommodation part, in order to alternately hold the substrates accommodated in the accommodation part by the substrate holders, the holding shafts are rotated to perform a substrate holding operation for moving the substrate holders to the cancel position, then moving them forwards in the intersection direction and moving them to the hold position thereafter. |
